P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdTpc-Stainless Steel Components It describes the concept of

It describes the concept of exception management

which control flow of ≤50 slm nitrogen equivalent at 308 kPa (44

008 Ωcm and 0

SEMI MF950-1107 (Reapproved 0718)

P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdTpc-Stainless Steel Components It describes the concept ofThis Standard specifies key requirements of fiducial marks that can be used as a coordinate system for referencing defect locations on extreme ultraviolet (EUV) blanks. This Standard is intended to set an appropriate level of technical specifications of mask fiducial marks, such as their locations, shapes, sizes, line dimensions, and limits of variation. The marks must be readable by mask metrology and pattern write tools. This Standard is not