E11600 - SEMI E116 - Specification for Equipment Performance Tracking Revision:SEMI E116-0518 - Superseded The test methods recommended herein

The test methods recommended herein apply to gas delivery systems not crated or packaged for shipment

overcoat layer

SEMI E84-0303 (technical revision)

Definition of such changes is the purpose of this Test Method

E11600 - SEMI E116 - Specification for Equipment Performance Tracking Revision:SEMI E116-0518 - Superseded The test methods recommended hereinThis Standard provides specification for implementing basic equipment performance tracking (EPT) for production equipment. Provisions in this Standard enable the host computer to track basic equipment performance in an automated and consistent matter, without operator or host input. This Standard provides specification for equipment suppliers to: Track basic equipment states (no operator or host input required). Track basic equipment states in a