E08400 - SEMI E84 - エンハンストキャリア移載パラレルI/Oインタフェースの仕様 StdTpc-CIM Framework This Safety Guideline applies to

This Safety Guideline applies to load ports that interface with front-opening unified pods (FOUP)

NOTICE: This document was balloted and approved for withdrawal in 2003

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee

and in particular for electrical power requirements such as those found in SEMI E51

E08400 - SEMI E84 - エンハンストキャリア移載パラレルI/Oインタフェースの仕様 StdTpc-CIM Framework This Safety Guideline applies toglobal Physical Interfaces & Carriers Committee200994global Audits and Reviews Subcommittee200910www. semi. org200911CD ROM19996200711 AMHS: automated material handling systemsFOUPAMHSPI O SEMI E23I O Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 Wafers SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E23 Specification for Cassette Transfer Parallel I O Interface SEMI E30 Generic