TEL Tokyo Electron WCPL/TRS Chill Plate Transition Stage Station Lithius Working Therma-Wave 37658-01 Interconnecting P-62 Board

Therma-Wave 37658-01 Interconnecting P-62 Board PCB OPTI-PROBE OP 7341 Working

Model No: Spectra

Part No: 2334801-21

I/O DISP #02 PCB SP001 ACT12-300 Used

TEL Tokyo Electron WCPL/TRS Chill Plate Transition Stage Station Lithius Working Therma-Wave 37658-01 Interconnecting P-62 BoardTEL Tokyo Electron WCPL TRS Chill Plate Transition Stage Station Lithius Working Part No: WCPL TRS Water Controlled Chill Plate Process Station Transition Stage Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5087 402532 13, BASE ASSY,FRONT 5010 101316 11 FRAME(CPL 1) 1 5010 306509 11 BRACKET 1 5010 306510 11 BRACKET 1 5010 405033 11