M01700 - SEMI M17 - Guide for a Universal Wafer Grid StdPbc-0315 SEMI E19 — Standard Mechanical

SEMI E19 — Standard Mechanical Interface (SMIF)

This Standard does not require

A detailed list of the fundamental GEM requirements and additional GEM capabilities can be found in § 11

SEMI E40-1106 (technical revision)

M01700 - SEMI M17 - Guide for a Universal Wafer Grid StdPbc-0315 SEMI E19 — Standard MechanicalMaximum allowable slip and other non uniformly distributed defects are frequently specified when procuring polished and epitaxial silicon wafers. SEMI M62 specifies a maximum allowable fraction of the epitaxial wafer surface area that can contain slip. This Guide provides a design for and guidance for use of a wafer grid that facilitates the determination of the fraction of the wafer surface area covered by observed defects. This Guide defines a grid