G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials Revision:SEMI G67-0996 (Reapproved 1104) - Superseded SEMI E88-1103 (technical revision)

SEMI E88-1103 (technical revision)

Determining the electrical length of RF cable assemblies at the nominal operating frequency in terms of degrees of phase shift

and transparent conductive films

SEMI MF110-00a (first SEMI publication)

G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials Revision:SEMI G67-0996 (Reapproved 1104) - Superseded SEMI E88-1103 (technical revision)NOTICE: This Document was reapproved with minor editorial changes. This Test Method describes a procedure to measure particles on sheet materials. The method described may be used for the measurement of particles on items such as: Leadframe Interleaves, Cleanroom Paper, and Packing Material. The procedures may be used by the material manufacturer for quality control or by a customer at incoming inspection. Referenced SEMI StandardsNone.