MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - Superseded 特定のラフネス測定の識別に関しての参考試験方法

特定のラフネス測定の識別に関しての参考試験方法

These attributes include electrical

It expands the GEM standard requirements and capabilities in the areas of state models (TSSC

SEMI E80-0299 (Reapproved 1104)

MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - Superseded 特定のラフネス測定の識別に関しての参考試験方法The diameter of semiconductor wafers is an important parameter in microelectronic fabrication. Wafer diameters must conform to the limits specified in SEMI M1; or other agreed upon limits, or product that is otherwise suitable may not fit correctly in process equipment. Cam follower edge rounding usually results in wafers that are circular. However, wafers ground with edge follower edge rounding equipment may be elliptically shaped. Measurements made