C10500 - SEMI C105 - Guide for Trace Iron Analysis in High Purity 2-Propanol (IPA) Revision:SEMI C105-0923 - Current previously published December 2011
$193.00
Description
previously published December 2011
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI C44-0514 (technical revision)
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C10500 - SEMI C105 - Guide for Trace Iron Analysis in High Purity 2-Propanol (IPA) Revision:SEMI C105-0923 - Current previously published December 2011Purpose The purpose of this Guide is to recommend procedures for trace iron analysis in high purity 2 propanol (IPA) needed by the semiconductor industry. Scope The scope of this Guide is the measurement of iron concentration in IPA, used in the semiconductor industry, with higher purity than Grade 4 IPA described in SEMI C41. The quantitative range of this method is 1 to 100 ppt. Instruments (bottles, etc.) for sampling IPA to be analyzed are
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