D01300 - SEMI D13 - FPD用カラーフィルタの用語 StdPbc-0919 provide a map between EFEM

provide a map between EFEM functional elements and existing standards

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25

SEMI PV59-0115 (first published)

Method A is recommended for examining the edge profile of flatted regions of the wafer

D01300 - SEMI D13 - FPD用カラーフィルタの用語 StdPbc-0919 provide a map between EFEMglobal Flat Panel Display Color Filters & Optical Elements Committee2008513global Audits and Reviews Subcommittee20086www. semi. org20087CD ROM1995200111 FPDCFCF Referenced SEMI Standards SEMI D3 Quality Area Specification for Flat Panel Display Substrates SEMI D20 Terminology for FPD Mask Defect SEMI D21 Terminology for FPD Mask Pattern Accuracy SEMI M21 Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array