D05700 - SEMI D57 - Guide for Definition of Measurement Index Visual Contrast Threshold (VCT) for Mura in FPD Image Quality Inspection Revision:SEMI D57-0823 - Current originally published March 2009
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Description
originally published March 2009
The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment structure and related elements
Due to the migration to large wafer sizes
26-89 (technical revision)
D05700 - SEMI D57 - Guide for Definition of Measurement Index Visual Contrast Threshold (VCT) for Mura in FPD Image Quality Inspection Revision:SEMI D57-0823 - Current originally published March 2009Specific definitions and quantifications of Mura are not consistent for many FPD manufacturers. Though there are standards for quantification of Mura, they are only used for limited types of Mura and are not practical in real varied cases. Currently it is still difficult to implement instruments to replace human inspectors for Mura inspections of LCDs. Therefore, it is necessary to standardize the classification of Mura for LCD. This Standard focuses
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