Lam Research 852-011061-103 Lower Chamber Assembly 4420 Etcher Untested Spare Inventory # A-12272

Inventory # A-12272

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LOOP CONTROL UNIT

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Lam Research 852-011061-103 Lower Chamber Assembly 4420 Etcher Untested Spare Inventory # A-12272Lam Research 852 011061 103 Lower Chamber Assembly 4420 Etcher Untested Spare Part No: 852 011061 103 Removed from a Lam Research 4420 Rainbow Plasma Etcher System Untested As Is Installed Components Part No: 715 011665 004, Cap, Lower Electrode, 4 Domed Part No: 716 011624 001, Ring, Ceramic Part No: 716 011570 001, Filler, Orice, W C, Ceramic Part No: 715 011035 001, Plate, Lower End (Reaction Chamber) Part No: 716 011623 001, Ring, Clamp Part No: