E02400 - SEMI E24 - クラスタツール・モジュール・インタフェース： 隔離バルブインタロックのスタンダード Revision:SEMI E24-92 (Withdrawn 0710) - Withdrawn Originally published March 2003

Originally published March 2003

SEMI MF1388 — Test Method for Generation Lifetime and Generation Velocity of Silicon Material by Capacitance-Time Measurements of Metal-Oxide-Silicon (MOS) Capacitors

Thus consideration must be given to structures and analyses that properly take these effects into account

which refer to this Standard

E02400 - SEMI E24 - クラスタツール・モジュール・インタフェース： 隔離バルブインタロックのスタンダード Revision:SEMI E24-92 (Withdrawn 0710) - Withdrawn Originally published March 2003Global Physical Interfaces & Carriers Committee2010430Global Audits and Reviews Subcommittee20106www. semi. org199220047 2010 Referenced SEMI Standards SEMI E21 Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard