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F03900 - SEMI F39 - Guide for Chemical Blending Systems StdPbc-0822 This Standard specifies the front-opening
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Description
This Standard specifies the front-opening shipping box (FOSB) used to ship 300 mm wafers from wafer suppliers to their customers (typically IC manufacturers)
SEMI E30-1296 (technical revision)
SEMI G95 — Mechanical Interface Specification for 450 mm Load Port for Tape Frame Cassettes in the Backend Process
all documents cited shall be the latest published versions
F03900 - SEMI F39 - Guide for Chemical Blending Systems StdPbc-0822 This Standard specifies the front-openingThis Guide establishes terminology, blend technique classification(s), system specification(s), performance characterization, and qualification methods for liquid chemical blending equipment. This Guide applies to chemical blending equipment used within a semiconductor manufacturing facility for the purposes of producing chemicals used for wafer processing. Referenced SEMI Standards (purchase separately) SEMI C1 Guide for the Analysis of Liquid
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