P04100 - SEMI P41 - XMLによる，検査装置，修正装置およびレビュー装置間で取扱うマスク欠陥データ仕様 Revision:SEMI P41-0304E - Inactive SEMI M10 — Standard Nomenclature

SEMI M10 — Standard Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide

The purpose of this Document is to provide specification for carbon tetrafluoride (CF4) that is used in the semiconductor industry

SEMI E82-0705 (technical revision)

SEMI MF154-1105 (technical revision)

P04100 - SEMI P41 - XMLによる，検査装置，修正装置およびレビュー装置間で取扱うマスク欠陥データ仕様 Revision:SEMI P41-0304E - Inactive SEMI M10 — Standard NomenclatureNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2009Japanese Regional Standards Committee20042www. semi. org20043 E 2004923 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to