F05800 - SEMI F58 - 大気圧イオン化質量分析計（APIMS）による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 StdTpc-Jig ID SEMI MF951-0305 (Reapproved 0316)

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SEMI MF951-0305 (Reapproved 0316)

NOTICE: This Standard was balloted and approved for withdrawal in 2021

This Specification defines a mechanical standard for the stationary (equipment) side of the docking flange used by PGVs

Dimensional metrics as described in several SEMI Test Methods do not define wafer physical orientation during measurement

F05800 - SEMI F58 - 大気圧イオン化質量分析計（APIMS）による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 StdTpc-Jig ID SEMI MF951-0305 (Reapproved 0316)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Gases Committee2008513global Audits and Reviews Subcommittee20086www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive

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