E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded This Standard defines a model

This Standard defines a model which represents logistics management of a carrier in equipment as Carrier Logistics Job (CLJ)

本スタンダードは，global Gases Committeeで技術的に承認されている。現版は2010年4月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2010年6月にwww

SEMI E125 — Specification for Equipment Self-Description (EqSD)

SEMI HB1 — Specifications for Sapphire Wafers Intended for Use for Manufacturing High Brightness-Light Emitting Diode Devices

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded This Standard defines a modelThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions