E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12

SEMI E134 — Specification for Data Collection Management

PBET helps to increase productivity and reduce costs based on the metrics defined in SEMI E79 and SEMI E35

The purpose of this document is to provide a standard

E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded This edition was approved forThis Standard describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor actuator communication network. This Standard is applicable to sensors which are regarded as data producers only.