P03600 - SEMI P36 - 測長走査型電子顕微鏡（CD-SEM）用倍率標準試料のガイド Revision:SEMI P36-1108 - Superseded This test method applies to

This test method applies to all types of surface mount and conventional gas distribution systems used in semiconductor processing

SEMI E82-1102 (technical revision)

This Specification defines a treatment of RAM and utilization measurement for MPCTs by first defining performance of IPSs as a function of equipment module-level performance

他にもエッジ近傍形状評価法があり，ZDD， ROA， PSFQRのような他の概念を定量化するものもある。

P03600 - SEMI P36 - 測長走査型電子顕微鏡（CD-SEM）用倍率標準試料のガイド Revision:SEMI P36-1108 - Superseded This test method applies toglobal Micropatterning Committee20088 29global Audits and Reviews Subcommittee200810www. semi. org200811CD ROM2006620083 (1) CD SEM(2) Referenced SEMI Standards None.