F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing Lang-Chinese (Simplified) This Test Method uses a

This Test Method uses a spectrum analyzer

背景および動機付け

SEMI E94-0312 (technical revision)

SEMI F61-0301 (Reapproved 0309)

F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing Lang-Chinese (Simplified) This Test Method uses aThis specification was technically reapproved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on October 25, 2002. Initially available at www. semi. org December 2002; to be published March 2003. Originally published in 1995. NOTICE: This document was balloted and approved for withdrawal in 2004. The purpose of this