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E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) Revision:SEMI E80-0299 (Reapproved 0915) - Superseded The order of the data
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Description
The order of the data items is not restricted in this Document
SEMI 3D11 — Terminology for Through Glass Via and Blind Via in Glass Geometrical Metrology
Figure 3 shows applications for the parallel I/O interface specified in this Document
X-Fab Silicon Foundries
E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) Revision:SEMI E80-0299 (Reapproved 0915) - Superseded The order of the dataThe purpose of this Test Method is to provide a standardized method for quantifying the effect of mounting attitude on a mass flow controller (MFC). This Standard provides a common basis for communication between manufacturers and users regarding testing and describing MFC mounting effects. This Standard describes a method to determine the effect of attitude (mounting position) of a MFC on flow span and zero. The intent of this Standard is not to
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