P02400 - SEMI P24 - CD測長手順 StdPbc-1020 free space to allow data
$115.50
Description
free space to allow data transmission
半導体と電子デバイスの製造者で用いる製造技術は，高密度化および高複雑化の方向に進化し続けている。高集積化，内部接続の高階層化および素子間・導体間分離の微細化にともなって，電界に起因する問題に対する敏感性は増加している。この文書は，既存の静電気電荷の移動技術に加え，電界に関するより緻密な調査を通じて損傷問題に取り組むための推奨事項を提供している。
SEMI F39-0699 (first published)
Health & Safety Global Technical Committee
P02400 - SEMI P24 - CD測長手順 StdPbc-1020 free space to allow dataNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeNorth American Microlithography Committee2004711North American Regional Standards Committee20049www. semi. org2004111994 NOTICE: This Standard or Safety Guideline has an Inactive Status because the
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