MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0118 This Guide does not cover

This Guide does not cover the selection of one of several possible test methods nor does it cover the case for which other reference materials must be used in the measurement of the properties of the ConRef

the customer may want to reference SEMI M1

which will

本仕様は，その使用に関連した全ての安全問題を取り扱うことを意図していない。この仕様の使用者は，その責任において，適切な安全及び健康上の作業方法を確立し，また使用前に規制上の制限への適用性を判断するものである。

MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0118 This Guide does not coverThis Test Method covers the measurement of scatter signals from surfaces into most of the reflective hemispherical collector above the surface. Calculation of the TIS, called Haze in some industries, is defined. This Test Method is particularly applicable to clean, optically smooth, front surface reflectors, such as semiconductor wafers, computer disk substrates, and mirrors, because under certain conditions the measured signals can be related to