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G00600 - SEMI G6 - 検査方法 封止リング平坦度 StdTpc-Physical Interfaces SEMI MF928-0317 (Reapproved 0622)
G00600 - SEMI G6 - 検査方法 封止リング平坦度 StdTpc-Physical Interfaces SEMI MF928-0317 (Reapproved 0622)
$180.00
Description
SEMI MF928-0317 (Reapproved 0622)
and tubing as specified in ASTM A269 and ASTM A632
The purpose of this Document is to provide a permanent withdrawal notice for SEMI F15 indicating that the technical content has been superseded by Appendix 2
It also provides guidance for interface design
G00600 - SEMI G6 - 検査方法 封止リング平坦度 StdTpc-Physical Interfaces SEMI MF928-0317 (Reapproved 0622)38. 382 mm0. 330 8. 382 mm0. 330 Referenced SEMI Standards None.
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