F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Revision:SEMI F65-1101 - Inactive 注意: 本文書は，編集上の修正を伴い，再承認された。

注意: 本文書は，編集上の修正を伴い，再承認された。

• Equipment and load port access mode switching

• Flow Coefficient

This Document provides a test method for the mono-dispersed polystyrene latex (PSL) challenging of liquid filters

F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Revision:SEMI F65-1101 - Inactive 注意: 本文書は，編集上の修正を伴い，再承認された。This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at www. semi. org September 2001; to be published November 2001. NOTICE: This Standard or Safety Guideline has an Inactive Status because the