TEL Tokyo Electron ICPL Interface Block Chill Plate Process Station Lithius Used Part No: 253B-26373

Part No: 253B-26373

Brooks Automation Part No: BM70100 This PRI Automation KX00003 PCB Card is used working surplus

HALL EFFECT HORIZONTAL This Novellus Systems 93-0122 Hall Effect Horizontal Sensor Assembly is new surplus

Part No: 15-055913-00

TEL Tokyo Electron ICPL Interface Block Chill Plate Process Station Lithius Used Part No: 253B-26373TEL Tokyo Electron ICPL Interface Block Chill Plate Process Station Lithius Used Part No: ICPL Model No: Interface Block Chill Plate Process Station ICP R Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5085 408538 14 BASE(ICP R)ASSY 5010 101202 11: FRAME(ICPL R) (Qty. 1) 5010 306891 11: PAN(R),DRAIN (Qty. 1) 5010 306892 11: