E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Revision:SEMI E4-0699 (Reapproved 0612) - Superseded 1 — Specification for SECS-II

1 — Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)

3-1016 (Reapproved 0225)

SEMI G71-0996 (first published)

Thermal decomposition temperature (see SEMI G75

E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Revision:SEMI E4-0699 (Reapproved 0612) - Superseded 1 — Specification for SECS-IIThis Standard provides a means for independent manufacturers to produce equipment and or hosts which can be connected without requiring specific knowledge of each other. The SECS I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host. Semiconductor processing equipment includes equipment intended for wafer manufacturing, wafer processing, process measuring, assembly and