F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems StdPbc-0822 3 This Specification does not

3  This Specification does not require that the metadata provided by the equipment be directly human readable

專門用語

SEMI MF673-1105 (Reapproved 0611)

It has become increasingly important in semiconductor material and device manufacturing to describe

F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems StdPbc-0822 3 This Specification does notThe purpose of this document is to provide a guide for the design, fabrication, and operation of secondarily contained distribution piping for hazardous production material (HPM) gases. This guide covers the general requirements for hazardous production material distribution piping in those industries that are included under the H 6 Classification of the Uniform Building Code, or Articles 51 or 80 of the Uniform Fire Code, or of other applicable local