E11700 - SEMI E117 - レチクルロードポートの仕様 StdPbc-1011 • fundamental GEM requirements and
$115.50
Description
• fundamental GEM requirements and
Both user and supplier of the minienvironment shall agree upon all important parameters defined in this Test Method
1-0702 (technical revision)
such as gold (Au) films
E11700 - SEMI E117 - レチクルロードポートの仕様 StdPbc-1011 • fundamental GEM requirements andglobal Physical Interfaces and Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org200211200411 RSP Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E19. 3 Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E72 Specification and Guide for 300 mm Equipment
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