P00300 - SEMI P3 - Specification for Photoresist/E-Beam Resist for Hard Surface Photoplates Revision:SEMI P3-0308 - Inactive Originally published March 2005

Originally published March 2005

SEMI E154 — Mechanical Interface Specification for 450mm Load Port

This Test Method applies only for 3-point bending method

1  This Standard provides the guide for combining versions of the SEMI EDA Standards for the successful EDA implementation

P00300 - SEMI P3 - Specification for Photoresist/E-Beam Resist for Hard Surface Photoplates Revision:SEMI P3-0308 - Inactive Originally published March 2005NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Document was completely rewritten in 2008. This Specification covers the general requirements on the photoresist and e beam resist coating for hard surface photoplates. See SEMI P1 and SEMI P2 for requirements