Hitachi ECI Microwave Auto Tuner Box Assembly CMC-10A CMC-ADP2 FEM-312 Working I1 M-712E Shallow Trench Etcher

I1 M-712E Shallow Trench Etcher Working Spare

Part No: 701840 This SPTS Technologies 701840 Pumping Port Shielding is new surplus

ASM Part No: 4022-668-83171

Gear Head Part No: 6GH5K-D1

Hitachi ECI Microwave Auto Tuner Box Assembly CMC-10A CMC-ADP2 FEM-312 Working I1 M-712E Shallow Trench EtcherHitachi ECI Microwave Auto Tuner Box Assembly CMC 10A CMC ADP2 FEM 312 Working Part No: Auto Tuner Box Removed from a Hitachi FEM 312 EFEM Equipment Front End Module Installed Components Daihen Tuning Control Unit Part No: CMC 10A Daihen Adapter Unit Part No: CMC ADP2 Cosel Power Supply Part No: PAA50F 24 N This item is working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: