F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Revision:SEMI F12-0998 - Inactive SEMI D63-0818 (technical revision)

SEMI D63-0818 (technical revision)

SEMI MF1392-0307 (Reapproved 0512)

Future enhancements to this

org September 2003

F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Revision:SEMI F12-0998 - Inactive SEMI D63-0818 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This method provides a uniform procedure to determine the sealing capabilities of fluorocarbon resin fittings, after they have been subjected to an elevated ambient temperature and cooled to room temperature (hereafter