E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdPbc-0418 This Document is not intended

This Document is not intended to describe a measurement procedure

Standardized test methods for measuring them are required to avoid disagreement between business partners regarding wafer quality and specification

The approximate range of generation lifetime that can be measured is 1 µs to 10 ms

SEMI E70-1103 (technical revision)

E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdPbc-0418 This Document is not intendedSEMI SEMI Physical Interfaces & Carriers Global Technical Committee20131223global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org2011620129 SEMI M74450 mm 450 MACMACFOUPFOUPMAC 450mm 450mm 450 mmKCP 3 Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E30. 1 Inspection and Review Specific Equipment Model (ISEM) SEMI E144 Provisional Specification for RF Air