TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly Perforated Lithius Model No: Series 612 This

Model No: Series 612 This VAT 61234-KAGQ-AMR1 Butterfly Valve Control System is used working surplus

SPATIAL FILTER CNTRL

Daughterboard Part No: PLAN PS4H

img{max-width:100%} Artesyn 509-021546-0004 4L Distribution Board 73-610-130 PCB Working Surplus

TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly Perforated Lithius Model No: Series 612 ThisTEL Tokyo Electron 5087 400391 12 ARM R COT Scan Assembly Perforated Lithius Inventory # A 18745 Part No: 5087 400391 12 Model No: SCAN ASSY ARM R COT Coat Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Installed Components Sanyo Denki Stepping Motor Part No: 103H7851 70E1, StepSyn SMC Linear Actuator Part No: LG 96A A1 Parts List (approximation, parts may vary) Assembly Part No: 5087 400391 12 SCAN ASSY 5024 000118 11