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MF172300 - SEMI MF1723 - Practice for Evaluation of Polycrystalline Silicon Rods by Float-Zone Crystal Growth and Spectroscopy Revision:SEMI MF1723-02 - Superseded The purpose of this Document

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The purpose of this Document is to provide a series of specifications for different grades of argon (Ar) that are used in the semiconductor industry

2 grade toxic specialty gases and to describe a reference method for its verification

with granularity to the recipe step level

the purchaser needs to specify which type of FOSB door is required:

MF172300 - SEMI MF1723 - Practice for Evaluation of Polycrystalline Silicon Rods by Float-Zone Crystal Growth and Spectroscopy Revision:SEMI MF1723-02 - Superseded The purpose of this Document#VALUE!

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