M05600 - SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias StdVol-Process Chemicals associated support equipment and facilities

associated support equipment and facilities infrastructure equipment function within acceptable ranges

1 The scope of the GEM Standard is limited to defining the behavior of semiconductor equipment as viewed through a communications link

which is used in the semiconductor industry for the deposition of tantalum nitride based layers by atomic layer deposition

Maximum allowable slip and other non-uniformly distributed defects are frequently specified when procuring polished and epitaxial silicon wafers

M05600 - SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias StdVol-Process Chemicals associated support equipment and facilitiesThis Practice covers a methodology to determine the costs associated with misclassification of product due to variability and bias of measurement equipment. These costs are associated with failing product that conforms with specifications and passing product that does not conform with specifications. This Practice can be applied to make relative cost comparisons between two or more measurement gauges operating under conditions specified by the user.