F02600 - SEMI F26 - Specification for Particle Concentration of Grade 10/0.2 Toxic Specialty Gases Revision:SEMI F26-0697 (Reapproved 0303) - Superseded SEMI E30-0200 (technical revision)

SEMI E30-0200 (technical revision)

Hexafluoroethane is one of the most stable of all organic compounds

1  This Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor/Actuator Network

This Standard was technically approved by the Flat Panel Display – Factory Automation Global Technical Committee

F02600 - SEMI F26 - Specification for Particle Concentration of Grade 10/0.2 Toxic Specialty Gases Revision:SEMI F26-0697 (Reapproved 0303) - Superseded SEMI E30-0200 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in January 2018; originally published June 1997; previously published July 2012. The purpose of this Document is to set a maximum permissible particle concentration for 10 0. 2 grade toxic specialty gases and to