Cleanrooms and associated controlled environments - Specifications for monitoring air cleanliness by nanoscale particle concentration Ingestion-build-59651 to the effect of self-heating

to the effect of self-heating

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limit dimension

It does not apply to wallcoverings whose primary purpose is structural or protective

Cleanrooms and associated controlled environments - Specifications for monitoring air cleanliness by nanoscale particle concentration Ingestion-build-59651 to the effect of self-heating1 Scope This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0. 1 microns (100 nm) or less nanoscale are considered. The monitoring given in this document is for use mainly in operational states. NOTE 1 For the purposes of this document, reference is made to nanoscale particles, which means all