M00800 - SEMI M8 - 鏡面単結晶シリコンテストウェーハの仕様 StdTpc-300 mm Packaging careful process and quality control

careful process and quality control of the wafer waviness during CSW and device manufacturing requires continuous monitoring of waviness by the supplier as well as by the user of CSW

terms used to describe the characteristics of the edge profile of silicon wafers are named and their meaning is illustrated by a schematic drawing

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3 — Specification for Web Services for Substrate Mapping

M00800 - SEMI M8 - 鏡面単結晶シリコンテストウェーハの仕様 StdTpc-300 mm Packaging careful process and quality controlglobal Silicon Wafer Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM198220063 Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M18 Format for Silicon Wafer Specification Form for Order Entry SEMI M24 Specification for Polished Monocrystalline Silicon Premium Wafers